October 19-20, 2006 Icho-Kaikan, Osaka University, Suita, Osaka, Japan Homepage of the Symposium in 2007 is here. Sponsored by The Japan Society for Precision Engineering (JSPE) and The 21st Century COE Program “Atomistic Fabrication Technology” Osaka University in cooperation with (tentative) The Japan Society of Applied Physics (JSAP) The Physical Society of Japan (JPS) The Technical Committee on Ultra Precision Machining of JSPE SCOPE: The COE international symposium, “Atomistic Fabrication Technology” is organized by the Japan Society of Precision Engineering and the 21st Century COE program at Osaka University. The aim of the COE project is to develop production technology of optical and electronic devices with atomic-level accuracy based on a new physical principle and to carry out collaborative research in conjunction with laboratories from other field of basic science and advanced industry. This symposium will provide an opportunity for scientists and engineers to exchange information and ideas at the forefront of research on the atomistic fabrication technology. Selected topics of current interests will be reviewed by several invited talks. The symposium will consist of invited and contributed talks and poster presentations. Papers are solicited in, but not limited to, the following area: ･Thin film deposition and materials science 　　　　Thin films of silicon and related materials, Novel deposition technology, 　　　　Material characterization, Plasma processing ･Ultraprecision Machining 　　　　Ultraprecision polishing, Surface figuring, Surface metrology, Surface evaluation ･Methods and Tools for Nano- and Micro-scale Functional Analysis 　　　　Development of novel methods & tools, Evaluation of optical, electronic, and geometric 　　　　configurations of devices, Nanofabrication tools ･Computational Engineering Design 　　　　First-principles calculations, Nanostructures, Electronic devices, Catalytic reaction, 　　　　Surface processing ･Advanced Solid State and Nanoelectronic Devices 　　　　CMOS devices, Displays, Sensors, MEMS, Novel memory devices and Bioelectronics A partial list of invited speakers includes: ･Role of hydrogen in silicon thin film materials (tentative), 　　　　Norbert Nickel, Hahn-Meitner-Institut Berlin, Germany ･Epitaxial growth and characterization of 4H-SiC (tentative), 　　　　Tsunenobu Kimoto, Kyoto University, Japan ･One-Dimensional charge transport in conducting polymer nanofibers, 　　　　Yung Woo Park, Seoul National University, Korea ･At-wavelength wavefront metrology with 0.1 nm accuracy for extreme ultraviolet optical systems, 　　　　Katsumi Sugisaki, EUVA, Japan ･Challenges in optics manufacturing (tentative), 　　　　Stephen D. Jacobs, University of Rochester, USA ･Nanoprecision Mechanical Fabrication Technologies applying ELID-Grinding, 　　　　Hitoshi Ohmori, RIKEN, Japan ･Ab-initio simulations of the mechanics, electrical transport and chemical reactivity of metal nanowires, 　　　　Jose A. Torres, The University of Tsukuba, Japan ･First-principles molecular dynamics simulations of chemical reactions at surfaces and interfaces, 　　　　Yoshitada Morikawa, Osaka University, Japan ･Advanced CMOS device technologies for 45nm node and below, 　　　　Anabela Veloso, IMEC, Belgium ･New Electron Devices Fabricated Using Bio Nano Process, 　　　　Yukiharu Uraoka, Nara Institute of Science and Technology, Japan Symposium Language: 　　　　The official language of the symposium is English. Submission of Papers: 　　　　Prospective authors must submit a camera-ready paper with all figures and tables. Please submit your paper in Adobe PDF format as an e-mail attachment to 21coe-symposiumupst.eng.osaka-u.ac.jp by July 21, 2006.　The paper must be written in English. The first page must be headed by the title of the paper, author(s), affiliation(s), address, phone number, fax number and e-mail address of the corresponding author. Detailed format information is available at the symposium web site. Authors of accepted papers will be notified by e-mail by August 25, 2006 and requested to give either an oral presentation or a poster presentation. Accepted papers will be printed and distributed to conference participants during the symposium. Symposium Program: 　　　　The symposium Program can be downloaded from here. Instruction for Speakers: 　　　　At oral session, a PC projector and overhead projector will be available. Speakers wishing to present their paper using the PC projector are required to carry their own computer. Poster session is scheduled for Thursday, October 19, from 16:45 to 18:30. Usable space on each poster board will be approximately 100 cm(W) x 200 cm(H). Each presentation will be assigned a board labeled with the paper number in the final program. Publication: 　　　　Authors of papers accepted in this symposium are encouraged to submit the original and significant part of the papers to the Science and Technology of Advanced Materials (STAM). The special issue will be published in March 2007. Registration: 　　　　Prospective authors and participants are invited to pre-resistor for the symposium. The symposium is free of charge. Please send an e-mail with a title “pre-registration” to 21coe-symposiumupst.eng.osaka-u.ac.jp by September 30, 2006. The e-mail should include your name, affiliation, e-mail address, phone & fax numbers, and participation to the banquet. Banquet: 　　　　The symposium banquet will be held on the evening of Thursday, October 19. Organizing Committee: Chairperson: Katsuyoshi Endo Members: Kikuji Hirose, Toshihiko Kataoka, Mizuho Morita, Kiyoshi Yasutake, Kazuto Yamauchi Steering Committee: Chairperson: Kiyoshi Yasutake Members: Motohiro Nakano, Hidekazu Goto, Yuji Kuwahara, Heiji Watanabe, Kazuya Yamamura, Hiroaki Kakiuchi, Yasuhisa Sano Program Committee: Chairperson: Kazuto Yamauchi Members: Tadahiro Komeda (Tohoku University, Japan), Tsunemoto Kuriyagawa (Tohoku University, Japan), Iwao Miyamoto (Tokyo University of Science, Japan), Seiichi Miyazaki (Hiroshima University, Japan), Hiroshi Nakayama (Osaka City University, Japan), Naoto Ohtake (Nagoya University, Japan), Norihiro Umeda (Tokyo University of Agriculture and Technology, Japan), Shigeaki Zaima (Nagoya University, Japan), Hideaki Kasai, Hiroshi Katayama-Yoshida, Motohiro Nakano, Hidekazu Goto, Yuji Kuwahara, Heiji Watanabe, Kazuya Yamamura, Hiroaki Kakiuchi, Yasuhisa Sano Symposium Web Site: http://www.upst.eng.osaka-u.ac.jp/21coe/english/21coe-symposium/index.html Important Dates: 　　　　Abstract Deadline: July 21, 2006 　　　　Notification of Acceptance: August 25, 2006 　　　　Pre-Registration Deadline: September 22, 2006 　　　　Symposium: October 19-20, 2006 Access: 　　　　Access to Osaka University (Suita Campus) 　　　　Access to Icho-Kaikan (No.57) Contact: 　　　　Symposium secretariat 　　　　21coe-symposiumupst.eng.osaka-u.ac.jp 　　　　Phone/Fax: +81-6-6879-7292